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By Pietro Mandracci

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The tantalum oxide thin films are amorphous as revealed by HRTEM investigation (not shown here). 43 44 Crystalline and Non-crystalline Solids Figure 4. AFM images of Ta2O5 thin films grown on Si substrate at different wavelengths: (a) 266 nm, and (b) 355 nm. Spectroscopic ellipsometry investigations show that the tantalum oxide layers present refractive indices close to those of tantalum pentoxides (Ta2O5) from the VASE32 database [18] (Figure 5). Figure 5. Refractive index of the Ta2O5 thin films deposited by PLD compared to a reference Ta2O5 thin film.

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