By Pietro Mandracci
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The tantalum oxide thin films are amorphous as revealed by HRTEM investigation (not shown here). 43 44 Crystalline and Non-crystalline Solids Figure 4. AFM images of Ta2O5 thin films grown on Si substrate at different wavelengths: (a) 266 nm, and (b) 355 nm. Spectroscopic ellipsometry investigations show that the tantalum oxide layers present refractive indices close to those of tantalum pentoxides (Ta2O5) from the VASE32 database  (Figure 5). Figure 5. Refractive index of the Ta2O5 thin films deposited by PLD compared to a reference Ta2O5 thin film.