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Extra info for Precision Assembly Technologies for Mini and Micro Products: Proceedings of the IFIP TC5 WG5.5 Third International Precision Assembly Seminar (IPAS ’2006), 19–21 February 2006, Bad Hofgastein, Austria
Microassembly. In Nof, Shimon, editor, The Handbook of Industrial Robotics, pages 1045-1066. John Wiley & Sons, seconde edition. Brussel, 13. Van et al. (2000). Assembly of microsystems. Annals ofthe CIRP, 49(2):451472. Chapuis, Y-A, et al. (2003). Les Microsystmes Intelligents : Technologies et Applications. In Journies Scientifiques Francophones: JSF. , , and Tai, Y-C. (1999). A MEMS ELECTROSTATIC PARTICLE TRANSPORTATION SYSTEM. Sensors and Actuators, A: PHYSICAL. Donald, B. R. et al. (2003).
Nevertheless, in the field of micromanipulation, two main challenging topics are still growing. First of all, some research works are done to automate microassembly cells () ([ls]). Very small and precise sensors must be developed and a lot of work is also done to integrate vision capabilities ((81) (). These researches may lead toward the development of microfactories (121) (). Secondly, performing micromanipulation tasks inside the chamber of a Scanning Electron hlicroscope (SEM) is very useful.
A new microfeeder design is proposed based on contactless pneumatic distributed manipulation. By cooperation of dynamically programmable microactuators, a number of feeding functions and even some elementary assembly operations can be achieved. Keywords: Microfeeding, Microassembly Distributed manipulation: Pneumatic, Contactless, INTRODUCTION The semiconductor industry over the last few decades has followed Moore's law: Dr. Gordon Moore in 1965 predicted the doubling of transistors in the same size of an IC every hvo years.